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Low VT CMOS using doped Hf-based oxides, TaC-based metals and laser-only anneal
Publication:
Low VT CMOS using doped Hf-based oxides, TaC-based metals and laser-only anneal
Date
2007
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kubicek, Stefan
;
Schram, Tom
;
Paraschiv, Vasile
;
Vos, Rita
;
Demand, Marc
;
Adelmann, Christoph
;
Witters, Thomas
;
Nyns, Laura
;
Ragnarsson, Lars-Ake
;
Yu, HongYu
;
Veloso, Anabela
;
Singanamalla, Raghunath
;
Kauerauf, Thomas
;
Rohr, Erika
;
Brus, Stephan
;
Vrancken, Christa
;
Chang, Vincent
;
Mitsuhashi, Riichirou
;
Akheyar, Amal
;
Cho, Hag-Ju
;
Hooker, Jacob
;
O'Sullivan, Barry
;
Chiarella, Thomas
;
Kerner, Christoph
;
Delabie, Annelies
;
Van Elshocht, Sven
;
De Meyer, Kristin
;
De Gendt, Stefan
;
Absil, Philippe
;
Hoffmann, Thomas Y.
;
Biesemans, Serge
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1978
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1978
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations