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Publication:

Low VT CMOS using doped Hf-based oxides, TaC-based metals and laser-only anneal

Date

2007
Proceedings Paper
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Author(s)

Kubicek, Stefan  
;
Schram, Tom  
;
Paraschiv, Vasile  
;
Vos, Rita  
;
Demand, Marc  
;
Adelmann, Christoph  
;
Witters, Thomas  
;
Nyns, Laura  
;
Ragnarsson, Lars-Ake  
;
Yu, HongYu
;
Veloso, Anabela  
;
Singanamalla, Raghunath
;
Kauerauf, Thomas
;
Rohr, Erika
;
Brus, Stephan  
;
Vrancken, Christa  
;
Chang, Vincent
;
Mitsuhashi, Riichirou
;
Akheyar, Amal
;
Cho, Hag-Ju
;
Hooker, Jacob
;
O'Sullivan, Barry  
;
Chiarella, Thomas  
;
Kerner, Christoph  
;
Delabie, Annelies  
;
Van Elshocht, Sven  
;
De Meyer, Kristin  
;
De Gendt, Stefan  
;
Absil, Philippe  
;
Hoffmann, Thomas Y.
;
Biesemans, Serge  

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1978 since deposited on 2021-10-16
Acq. date: 2025-10-23

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1978 since deposited on 2021-10-16
Acq. date: 2025-10-23

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