Publication:
Micromachining of pulsed laser annealed PECVD SixGe1-x deposited at temperatures <=370°C
Date
| dc.contributor.author | Sedky, Sherif | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.date.accessioned | 2021-10-16T04:57:33Z | |
| dc.date.available | 2021-10-16T04:57:33Z | |
| dc.date.issued | 2005-01 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11186 | |
| dc.source.beginpage | 487 | |
| dc.source.conference | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems - MEMS | |
| dc.source.conferencedate | 30/01/2005 | |
| dc.source.conferencelocation | Miami Beach, FL USA | |
| dc.source.endpage | 490 | |
| dc.title | Micromachining of pulsed laser annealed PECVD SixGe1-x deposited at temperatures <=370°C | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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