Publication:
Pure-Metal Replacement Gate for Reliable 30 nm Pitch Scaled 3D NAND Flash
| dc.contributor.author | Rachidi, Sana | |
| dc.contributor.author | Ramesh, Siva | |
| dc.contributor.author | Tierno, Davide | |
| dc.contributor.author | Donadio, Gabriele Luca | |
| dc.contributor.author | Pacco, Antoine | |
| dc.contributor.author | Maes, J. W. | |
| dc.contributor.author | Jeong, Yongbin | |
| dc.contributor.author | Arreghini, Antonio | |
| dc.contributor.author | Van den Bosch, Geert | |
| dc.contributor.author | Rosmeulen, Maarten | |
| dc.contributor.imecauthor | Rachidi, S. | |
| dc.contributor.imecauthor | Ramesh, S. | |
| dc.contributor.imecauthor | Tierno, D. | |
| dc.contributor.imecauthor | Donadio, G. L. | |
| dc.contributor.imecauthor | Pacco, A. | |
| dc.contributor.imecauthor | Jeong, Y. | |
| dc.contributor.imecauthor | Arreghini, A. | |
| dc.contributor.imecauthor | Van den Bosch, G. | |
| dc.contributor.imecauthor | Rosmeulen, M. | |
| dc.date.accessioned | 2024-07-12T18:43:08Z | |
| dc.date.available | 2024-07-12T18:43:08Z | |
| dc.date.issued | 2024 | |
| dc.description.wosFundingText | This work has been funded by imec's Industrial Affiliation Program on Storage Memory devices. | |
| dc.identifier.doi | 10.1109/IMW59701.2024.10536954 | |
| dc.identifier.eisbn | 979-8-3503-0652-1 | |
| dc.identifier.issn | 2330-7978 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/44148 | |
| dc.publisher | IEEE | |
| dc.source.conference | International Memory Workshop (IMW) | |
| dc.source.conferencedate | 2024-05-12 | |
| dc.source.conferencelocation | Seoul | |
| dc.source.numberofpages | 4 | |
| dc.subject.keywords | MOLYBDENUM | |
| dc.title | Pure-Metal Replacement Gate for Reliable 30 nm Pitch Scaled 3D NAND Flash | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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