Circular MEM resonator: modeling second order effects on resonance frequency

dc.contributor.author	Nada, Yasseen
dc.contributor.author	Stoffels, Steve
dc.contributor.author	Tilmans, Harrie
dc.contributor.author	Hegazi, E.
dc.contributor.author	Ragai, H.F.
dc.contributor.author	Shaarawi, A.M.
dc.contributor.imecauthor	Stoffels, Steve
dc.contributor.imecauthor	Tilmans, Harrie
dc.contributor.orcidimec	Tilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned	2021-10-17T09:15:25Z
dc.date.available	2021-10-17T09:15:25Z
dc.date.embargo	9999-12-31
dc.date.issued	2008-04
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/14208
dc.source.conference	Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems - EuroSimE
dc.source.conferencedate	20/04/2008
dc.source.conferencelocation	Delft The Netherlands
dc.title	Circular MEM resonator: modeling second order effects on resonance frequency
dc.type	Proceedings paper
dspace.entity.type	Publication
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