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Very low temperature epitaxy of group-IV semiconductors for use in finFET, stacked nanowires and monolithic 3D integration
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Very low temperature epitaxy of group-IV semiconductors for use in finFET, stacked nanowires and monolithic 3D integration
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Date
2018
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Porret, Clément
;
Hikavyy, Andriy
;
Gomez Granados, Juan Fernando
;
Baudot, Sylvain
;
Vohra, Anurag
;
Kunert, Bernardette
;
Douhard, Bastien
;
Bogdanowicz, Janusz
;
Schaekers, Marc
;
Kohen, David
;
Margetis, Joe
;
Tolle, John
;
Petersen Lima, Lucas
;
Sammak, Amir
;
Scappucci, Giordano
;
Rosseel, Erik
;
Langer, Robert
;
Loo, Roger
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1958
since deposited on 2021-10-26
Acq. date: 2025-12-15
Citations
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Views
1958
since deposited on 2021-10-26
Acq. date: 2025-12-15
Citations