Publication:
Germanium surface conditioning and passivation
Date
| dc.contributor.author | Sioncke, Sonja | |
| dc.contributor.author | Chabal, Yves J. | |
| dc.contributor.author | Frank, Martin M. | |
| dc.date.accessioned | 2021-10-19T18:58:43Z | |
| dc.date.available | 2021-10-19T18:58:43Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19800 | |
| dc.source.beginpage | 429 | |
| dc.source.book | Handbook of Cleaning in Semiconductor Manufacturing: Fundamental and Applications | |
| dc.source.endpage | 472 | |
| dc.title | Germanium surface conditioning and passivation | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |