Publication:
Investigation of die-cost scaling scenarios in future technologies
| dc.contributor.author | Mirabelli, Gioele | |
| dc.contributor.author | Tsai, Y.-P. | |
| dc.contributor.author | Chang, Y.-H. | |
| dc.contributor.author | Velenis, Dimitrios | |
| dc.contributor.author | Kim, Ryan Ryoung Han | |
| dc.contributor.author | Myers, James | |
| dc.contributor.author | Ragnarsson, Lars-Ake | |
| dc.contributor.author | Zografos, Odysseas | |
| dc.contributor.author | Hellings, Geert | |
| dc.contributor.imecauthor | Mirabelli, G. | |
| dc.contributor.imecauthor | Tsai, Y. -P. | |
| dc.contributor.imecauthor | Chang, Y. -H. | |
| dc.contributor.imecauthor | Velenis, D. | |
| dc.contributor.imecauthor | Kim, R. -H. | |
| dc.contributor.imecauthor | Myers, J. | |
| dc.contributor.imecauthor | Ragnarsson, L. -A. | |
| dc.contributor.imecauthor | Zografos, O. | |
| dc.contributor.imecauthor | Hellings, G. | |
| dc.date.accessioned | 2024-06-15T17:25:02Z | |
| dc.date.available | 2024-06-15T17:25:02Z | |
| dc.date.issued | 2024 | |
| dc.identifier.doi | 10.1117/12.3010149 | |
| dc.identifier.eisbn | 978-1-5106-7215-4 | |
| dc.identifier.isbn | 978-1-5106-7214-7 | |
| dc.identifier.issn | 0277-786X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/44030 | |
| dc.publisher | SPIE-INT SOC OPTICAL ENGINEERING | |
| dc.source.beginpage | 129540E | |
| dc.source.conference | Conference on DTCO and Computational Patterning III | |
| dc.source.conferencedate | 2024-02-25 | |
| dc.source.conferencelocation | San Jose | |
| dc.source.journal | Proceedings of SPIE | |
| dc.source.numberofpages | 7 | |
| dc.title | Investigation of die-cost scaling scenarios in future technologies | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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