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Optimization of Retention in Ferroelectricity Boosted Gate Stacks for 3D NAND

 
dc.contributor.authorBreuil, Laurent
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorStiers, Jimmy
dc.contributor.authorArreghini, Antonio
dc.contributor.authorRamesh, Siva
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorVan Houdt, Jan
dc.contributor.authorRosmeulen, Maarten
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorStiers, Jimmy
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorRamesh, Siva
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.imecauthorRosmeulen, Maarten
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecPopovici, Mihaela Ioana::0000-0002-9838-1088
dc.contributor.orcidimecStiers, Jimmy::0009-0001-7264-8231
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecRamesh, Siva::0000-0002-8473-7258
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.contributor.orcidimecRosmeulen, Maarten::0000-0002-3663-7439
dc.date.accessioned2024-04-11T15:10:13Z
dc.date.available2023-07-28T17:39:35Z
dc.date.available2024-04-11T15:10:13Z
dc.date.issued2023
dc.description.wosFundingTextThis work has been funded by imec's Industrial Affiliation Program on Storage Memory devices.
dc.identifier.doi10.1109/IMW56887.2023.10145986
dc.identifier.eisbn978-1-6654-7459-7
dc.identifier.issn2330-7978
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42221
dc.publisherIEEE
dc.source.beginpage105
dc.source.conference15th IEEE International Memory Workshop (IMW)
dc.source.conferencedateMAY 21-24, 2023
dc.source.conferencelocationMonterey
dc.source.endpage108
dc.source.journalN/A
dc.source.numberofpages4
dc.title

Optimization of Retention in Ferroelectricity Boosted Gate Stacks for 3D NAND

dc.typeProceedings paper
dspace.entity.typePublication
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