Publication:
Challenges in FEOL for 45nm and beyond
Date
| dc.contributor.author | Biesemans, Serge | |
| dc.contributor.imecauthor | Biesemans, Serge | |
| dc.date.accessioned | 2021-10-15T12:44:09Z | |
| dc.date.available | 2021-10-15T12:44:09Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8591 | |
| dc.source.conference | International Conference Semiconductor Technology - ICTS | |
| dc.source.conferencedate | 15/09/2004 | |
| dc.source.conferencelocation | Shangai China | |
| dc.title | Challenges in FEOL for 45nm and beyond | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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