Publication:
Carbon nanotube growth for high aspect ratio interconnect applications
Date
| dc.contributor.author | Xie, Rongsie | |
| dc.contributor.author | Zhang, Can | |
| dc.contributor.author | Chen, Bingan | |
| dc.contributor.author | Zhong, Guofang | |
| dc.contributor.author | Robertson, john | |
| dc.contributor.author | van der Veen, Marleen | |
| dc.contributor.imecauthor | van der Veen, Marleen | |
| dc.contributor.orcidimec | van der Veen, Marleen::0000-0002-9402-8922 | |
| dc.date.accessioned | 2021-10-20T19:07:22Z | |
| dc.date.available | 2021-10-20T19:07:22Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21866 | |
| dc.identifier.url | https://elsevier.conference-services.net/resources/247/3113/pdf/DIAM2012_0451.pdf | |
| dc.source.beginpage | O67 | |
| dc.source.conference | 23rd International Conference on Diamond and Carbon Materials | |
| dc.source.conferencedate | 3/09/2012 | |
| dc.source.conferencelocation | Granada Spain | |
| dc.title | Carbon nanotube growth for high aspect ratio interconnect applications | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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