Publication:
Ge-migration in s-Si-SiGe structures during implantation and annealing
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1948 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-08
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Metrics
Views
1948 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-08
Citations