Publication:
The deposition Of Ru and RuO2 flms for DRAM electrode
Date
| dc.contributor.author | Schaekers, Marc | |
| dc.contributor.author | Capon, Boris | |
| dc.contributor.author | Detavernier, Christophe | |
| dc.contributor.author | Blasco, Nicolas | |
| dc.contributor.imecauthor | Schaekers, Marc | |
| dc.contributor.orcidimec | Schaekers, Marc::0000-0002-1496-7816 | |
| dc.date.accessioned | 2021-10-18T21:20:07Z | |
| dc.date.available | 2021-10-18T21:20:07Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17954 | |
| dc.source.beginpage | 135 | |
| dc.source.conference | Atomic Layer Deposition Applications 6 | |
| dc.source.conferencedate | 10/10/2010 | |
| dc.source.conferencelocation | Las Vegas, NV USA | |
| dc.source.endpage | 144 | |
| dc.title | The deposition Of Ru and RuO2 flms for DRAM electrode | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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