Publication:

Binary and ternary intermetallics for advanced interconnect metallization

Date

2024-04
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dc.contributor.authorSoulie, Jean-Philippe
dc.contributor.authorHeylen, Nancy
dc.contributor.authorSankaran, Kiroubanand
dc.contributor.authorScheerder, Jeroen
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorSwerts, Johan
dc.contributor.authorTokei, Zsolt
dc.contributor.authorAdelmann, Christoph
dc.contributor.imecauthorSoulie, Jean-Philippe
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorSankaran, Kiroubanand
dc.contributor.imecauthorScheerder, Jeroen
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.orcidimecSoulie, Jean-Philippe::0000-0002-5956-6485
dc.contributor.orcidimecHeylen, Nancy::0009-0008-0490-0993
dc.contributor.orcidimecSankaran, Kiroubanand::0000-0001-6988-7269
dc.contributor.orcidimecScheerder, Jeroen::0000-0002-9301-0392
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecSwerts, Johan::0000-0001-7547-7194
dc.contributor.orcidimecTokei, Zsolt::0000-0003-3545-3424
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.date.accessioned2024-05-28T08:19:56Z
dc.date.available2024-05-28T08:19:56Z
dc.date.issued2024-04
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43976
dc.source.conference2024 MRS Spring Meeting and Exhibit
dc.source.conferencedate2024-04-22
dc.source.conferencelocationSeattle
dc.subject.keywordsInterconnects
dc.title

Binary and ternary intermetallics for advanced interconnect metallization

dc.typeOral presentation
dspace.entity.typePublication
dspace.file.typeMS Word
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