Publication:

Organic contamination: impact, characterization, sources and cleaning during IC manufacturing

Date

2001
Proceedings Paper
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dc.contributor.authorClaes, Martine
dc.contributor.authorDe Gendt, Stefan
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-14T16:41:42Z
dc.date.available2021-10-14T16:41:42Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5141
dc.source.beginpage320
dc.source.conferenceCrystalline Defects and Contamination: Their Impact and Control in Device Manufacturing III; DECON 2001
dc.source.conferencelocation
dc.source.endpage335
dc.title

Organic contamination: impact, characterization, sources and cleaning during IC manufacturing

dc.typeProceedings paper
dspace.entity.typePublication
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