Publication:
Recent Results from Imec on Hydrogen Passivation
Date
| dc.contributor.author | El Gamel, Hussam | |
| dc.contributor.author | Nijs, Johan | |
| dc.contributor.author | Mertens, Robert | |
| dc.contributor.imecauthor | Mertens, Robert | |
| dc.date.accessioned | 2021-09-29T12:41:01Z | |
| dc.date.available | 2021-09-29T12:41:01Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/142 | |
| dc.source.conference | 4th Workshop on the Role of Point Defects / Defect Complexes in Silicon Device Processing; 1994; USA. | |
| dc.title | Recent Results from Imec on Hydrogen Passivation | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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