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High depth resolution analysis of Si/SiGe multilayers with the atom probe
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High depth resolution analysis of Si/SiGe multilayers with the atom probe
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Date
2009
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Koelling, Sebastian
;
Gilbert, Matthieu
;
Goossens, Jozefien
;
Hikavyy, Andriy
;
Richard, Olivier
;
Vandervorst, Wilfried
Journal
Applied Physics Letters
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1923
since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations
Metrics
Views
1923
since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations