Publication:
Overview MX2 deposition by ALD and CVD methods
Date
| dc.contributor.author | Delabie, Annelies | |
| dc.contributor.imecauthor | Delabie, Annelies | |
| dc.date.accessioned | 2021-10-23T10:31:18Z | |
| dc.date.available | 2021-10-23T10:31:18Z | |
| dc.date.issued | 2016 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26529 | |
| dc.source.conference | 2Dfun Workshop | |
| dc.source.conferencedate | 14/10/2016 | |
| dc.source.conferencelocation | Leuven Belgium | |
| dc.title | Overview MX2 deposition by ALD and CVD methods | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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