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Secondary ion signal variation during oxygen build-up in Si
Publication:
Secondary ion signal variation during oxygen build-up in Si
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Date
1997
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tian, Chunsheng
;
Beyer, Gerald
;
Vandervorst, Wilfried
;
Kilner, J. A.
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1893
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Acq. date: 2025-12-10
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Metrics
Views
1893
since deposited on 2021-09-30
1
last month
Acq. date: 2025-12-10
Citations