Publication:
Simulations and measurements of capacitance in dielectric stacks and consequences for integration
Date
| dc.contributor.author | De Roest, David | |
| dc.contributor.author | Donaton, R. A. | |
| dc.contributor.author | Stucchi, Michele | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Nauwelaers, Bart | |
| dc.contributor.imecauthor | De Roest, David | |
| dc.contributor.imecauthor | Stucchi, Michele | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.imecauthor | Nauwelaers, Bart | |
| dc.date.accessioned | 2021-10-14T12:49:23Z | |
| dc.date.available | 2021-10-14T12:49:23Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4272 | |
| dc.source.conference | Materials for Advanced Metallization Conference - MAM; February 28 - March 1, 2000; Stresa, Italy. | |
| dc.source.conferencelocation | ||
| dc.title | Simulations and measurements of capacitance in dielectric stacks and consequences for integration | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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