Publication:

Low-Temperature Oxidation Kinetics of Polymer-Embedded ECD Copper

Date

2023-06
Journal article
https://doi.org/10.1007/s11837-023-05727-4
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dc.contributor.authorChery, Emmanuel
dc.contributor.authorCroes, Kristof
dc.contributor.imecauthorChery, Emmanuel
dc.contributor.imecauthorCroes, Kristof
dc.contributor.orcidimecChery, Emmanuel::0000-0002-2526-3873
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.date.accessioned2023-07-25T09:38:14Z
dc.date.available2023-03-29T03:54:06Z
dc.date.available2023-05-25T07:59:25Z
dc.date.available2023-07-25T09:38:14Z
dc.date.embargo2024-03-06
dc.date.issued2023-06
dc.identifier.doi10.1007/s11837-023-05727-4
dc.identifier.issn1047-4838
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41398
dc.publisherSPRINGER
dc.source.beginpage1875
dc.source.endpage1879
dc.source.issue6
dc.source.journalJOM
dc.source.numberofpages6
dc.source.volume75
dc.subject.keywordsCU THIN-FILMS
dc.subject.keywordsSHEET RESISTANCE
dc.subject.keywordsSELF-DIFFUSION
dc.subject.keywordsOXIDE-FILMS
dc.subject.keywordsBEHAVIOR
dc.subject.keywordsMECHANISM
dc.subject.keywordsBARRIER
dc.subject.keywordsSURFACE
dc.subject.keywordsGROWTH
dc.subject.keywordsMODEL
dc.title

Low-Temperature Oxidation Kinetics of Polymer-Embedded ECD Copper

dc.typeJournal article
dspace.entity.typePublication
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