Publication:
Characterization of low-k dielectric films by ellipsometric porosimetry
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Mogilnikov, K. P. | |
| dc.date.accessioned | 2021-10-14T12:40:11Z | |
| dc.date.available | 2021-10-14T12:40:11Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4090 | |
| dc.source.conference | MRS Spring Meeting 2000. Symposium D: Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics | |
| dc.source.conferencedate | 23/04/2000 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | Characterization of low-k dielectric films by ellipsometric porosimetry | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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