Publication:
Substitutional carbon loss in Si:C stressor layers probed by Deep-Level Transient Spectroscopy
Date
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Dhayalan, Sathish Kumar | |
| dc.contributor.author | Hikavyy, Andriy | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Rosseel, Erik | |
| dc.contributor.author | Vrielinck, Hemk | |
| dc.contributor.author | Lauwaert, Johan | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.imecauthor | Hikavyy, Andriy | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Rosseel, Erik | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.contributor.orcidimec | Hikavyy, Andriy::0000-0002-8201-075X | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-23T14:55:44Z | |
| dc.date.available | 2021-10-23T14:55:44Z | |
| dc.date.issued | 2016 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27313 | |
| dc.identifier.url | http://ecst.ecsdl.org/content/75/4/3.abstract | |
| dc.source.beginpage | 3 | |
| dc.source.conference | 14th Symposium on High Purity and High Mobility Semiconductors | |
| dc.source.conferencedate | 2/10/2016 | |
| dc.source.conferencelocation | Pennington USA | |
| dc.source.endpage | 11 | |
| dc.title | Substitutional carbon loss in Si:C stressor layers probed by Deep-Level Transient Spectroscopy | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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