Publication:

Direct metal nanowire patterning using ion beam etch

Date

2017
Meeting abstract
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dc.contributor.authorKundu, Shreya
dc.contributor.authorDutta, Shibesh
dc.contributor.authorGupta, Anshul
dc.contributor.authorJamieson, Geraldine
dc.contributor.authorPiumi, Daniele
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorWilson, Chris
dc.contributor.authorTokei, Zsolt
dc.contributor.authorAdelmann, Christoph
dc.contributor.imecauthorKundu, Shreya
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorJamieson, Geraldine
dc.contributor.imecauthorPiumi, Daniele
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.orcidimecJamieson, Geraldine::0000-0002-6750-097X
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.date.accessioned2021-10-24T07:15:15Z
dc.date.available2021-10-24T07:15:15Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28725
dc.identifier.urlhttp://www2.avs.org/symposium2017/Papers/Paper_PS-WeM13.html
dc.source.beginpagePS-WeM13
dc.source.conferenceAVS 64th International Symposium and Exhibition
dc.source.conferencedate29/10/2017
dc.source.conferencelocationTampa, FL USA
dc.title

Direct metal nanowire patterning using ion beam etch

dc.typeMeeting abstract
dspace.entity.typePublication
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