Effect of ultraviolet curing wavelength on low-k dielectric material properties and plasma damage resistance

dc.contributor.author	Marsik, Premysl
dc.contributor.author	Urbanowicz, Adam
dc.contributor.author	Verdonck, Patrick
dc.contributor.author	De Roest, David
dc.contributor.author	Sprey, Hessel
dc.contributor.author	Baklanov, Mikhaïl
dc.contributor.imecauthor	Verdonck, Patrick
dc.contributor.imecauthor	De Roest, David
dc.contributor.imecauthor	Sprey, Hessel
dc.contributor.orcidimec	Verdonck, Patrick::0000-0003-2454-0602
dc.date.accessioned	2021-10-19T16:05:11Z
dc.date.available	2021-10-19T16:05:11Z
dc.date.embargo	9999-12-31
dc.date.issued	2011
dc.identifier.issn	0040-6090
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/19390
dc.source.beginpage	3619
dc.source.endpage	3626
dc.source.issue	11
dc.source.journal	Thin Solid Films
dc.source.volume	519
dc.title	Effect of ultraviolet curing wavelength on low-k dielectric material properties and plasma damage resistance
dc.type	Journal article
dspace.entity.type	Publication
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