Publication:

Impact of through silicon via induced mechanical stress on fully depleted bulk FinFET technology

Date

2012
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

25220.pdf 3.01 MB

Author(s)

Guo, Wei  
;
Van der Plas, Geert  
;
Ivankovic, Andrej
;
Cherman, Vladimir  
;
Eneman, Geert  
;
De Wachter, Bart  
;
Togo, Mitsuhiro
;
Redolfi, Augusto  
;
Kubicek, Stefan  
;
Civale, Yann
;
Chiarella, Thomas  
;
Vandevelde, Bart  
;
Croes, Kristof  
;
De Wolf, Ingrid  
;
Debusschere, Ingrid  
;
Mercha, Abdelkarim  
;
Thean, Aaron  
;
Beyer, Gerald  
;
Swinnen, Bart  
;
Beyne, Eric  

Journal

Abstract

Description

Statistics

Views

1957 since deposited on 2021-10-20
1last month
1last week
Acq. date: 2026-07-18

Citations

Statistics

Views

1957 since deposited on 2021-10-20
1last month
1last week
Acq. date: 2026-07-18

Citations