Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Impact of through silicon via induced mechanical stress on fully depleted bulk FinFET technology
Publication:
Impact of through silicon via induced mechanical stress on fully depleted bulk FinFET technology
Date
2012
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
25220.pdf
3.01 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Guo, Wei
;
Van der Plas, Geert
;
Ivankovic, Andrej
;
Cherman, Vladimir
;
Eneman, Geert
;
De Wachter, Bart
;
Togo, Mitsuhiro
;
Redolfi, Augusto
;
Kubicek, Stefan
;
Civale, Yann
;
Chiarella, Thomas
;
Vandevelde, Bart
;
Croes, Kristof
;
De Wolf, Ingrid
;
Debusschere, Ingrid
;
Mercha, Abdelkarim
;
Thean, Aaron
;
Beyer, Gerald
;
Swinnen, Bart
;
Beyne, Eric
Journal
Abstract
Description
Metrics
Views
1949
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations
Metrics
Views
1949
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations