Publication:
A vertical Si/Si1-xGex heterojunction pMOSFET with reduced DIBL sensitivity, using a novel gate dielectric approach
Date
| dc.contributor.author | Verheyen, P. | |
| dc.contributor.author | Collaert, Nadine | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | De Meyer, Kristin | |
| dc.contributor.author | Van Rossum, Marc | |
| dc.contributor.imecauthor | Collaert, Nadine | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | De Meyer, Kristin | |
| dc.contributor.orcidimec | Collaert, Nadine::0000-0002-8062-3165 | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-14T11:55:09Z | |
| dc.date.available | 2021-10-14T11:55:09Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4004 | |
| dc.source.beginpage | 19 | |
| dc.source.conference | 1999 International Symposium on VLSI Technology, Systems, and Applications. Proceedings of Technical Papers; 8-10 June 1999; Tai | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 22 | |
| dc.title | A vertical Si/Si1-xGex heterojunction pMOSFET with reduced DIBL sensitivity, using a novel gate dielectric approach | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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