The peel-off probe: a cost-effective probe for electrical atomic force microscopy

dc.contributor.author	Hantschel, Thomas
dc.contributor.author	Slesazeck, Stefan
dc.contributor.author	Duhayon, Natasja
dc.contributor.author	Xu, Mingwei
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Hantschel, Thomas
dc.contributor.imecauthor	Duhayon, Natasja
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Hantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned	2021-10-14T13:02:46Z
dc.date.available	2021-10-14T13:02:46Z
dc.date.issued	2000
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/4417
dc.source.beginpage	50
dc.source.conference	Materials and Device Characterization in Micromachining III
dc.source.conferencedate	17/09/2000
dc.source.conferencelocation	Santa Clara, CA USA
dc.source.endpage	59
dc.title	The peel-off probe: a cost-effective probe for electrical atomic force microscopy
dc.type	Proceedings paper
dspace.entity.type	Publication
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