Publication:

Residue formation in MHM-based low-k etch

Date

2008
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Goossens, Danny  
;
de Marneffe, Jean-Francois  
;
Conard, Thierry  
;
Hendrickx, Dirk  
;
Struyf, Herbert  
;
Boullart, Werner  

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1990 since deposited on 2021-10-17
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1990 since deposited on 2021-10-17
Acq. date: 2026-04-05

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