Publication:

A year of new mask defectivity insights in imec's EUVL program

Date

2013

Proceedings Paper

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Author(s)

Jonckheere, Rik

;

Van Den Heuvel, Dieter

;

Baudemprez, Bart

;

Jehoul, Christiane

;

Metrics

1935 since deposited on 2021-10-21

Acq. date: 2025-12-12