Publication:
SiGe MEMS accelerometers combining a large bandwidth with a high capacitive sensitivity
Date
| dc.contributor.author | Ray Chaudhuri, Ashesh | |
| dc.contributor.author | Severi, Simone | |
| dc.contributor.author | Erismis, Mehmet Akif | |
| dc.contributor.author | Francis, Laurent | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.imecauthor | Ray Chaudhuri, Ashesh | |
| dc.contributor.imecauthor | Severi, Simone | |
| dc.date.accessioned | 2021-10-20T15:09:43Z | |
| dc.date.available | 2021-10-20T15:09:43Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21384 | |
| dc.identifier.url | www.sciencedirect.com | |
| dc.source.beginpage | 742 | |
| dc.source.conference | 26th European Conference on Solid-State Transducers - EUROSENSOR | |
| dc.source.conferencedate | 9/09/2012 | |
| dc.source.conferencelocation | Krakow Poland | |
| dc.source.endpage | 745 | |
| dc.title | SiGe MEMS accelerometers combining a large bandwidth with a high capacitive sensitivity | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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