Publication:
Low-k films for 22 nm technology node and beyond
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Zhao, Larry | |
| dc.date.accessioned | 2021-10-19T12:31:32Z | |
| dc.date.available | 2021-10-19T12:31:32Z | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18525 | |
| dc.source.conference | Rusnanoforum 2011 | |
| dc.source.conferencedate | 25/10/2011 | |
| dc.source.conferencelocation | Moscow Russia | |
| dc.title | Low-k films for 22 nm technology node and beyond | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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