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Oxygen-deficiency centers in SiO2 thermally nitrided in NO

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dc.contributor.authorGarcia Tello, Pablo
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorStesmans, Andre
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorStesmans, Andre
dc.date.accessioned2021-10-15T13:30:52Z
dc.date.available2021-10-15T13:30:52Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8938
dc.source.beginpage81
dc.source.endpage84
dc.source.issue1_4
dc.source.journalMicroelectronic Engineering
dc.source.volume72
dc.title

Oxygen-deficiency centers in SiO2 thermally nitrided in NO

dc.typeJournal article
dspace.entity.typePublication
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