Publication:
Al-induced defect generation in cubic phase HfO2/SiO2/Si gate stacks
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2005 since deposited on 2021-10-20
2last month
Acq. date: 2025-12-08
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Metrics
Views
2005 since deposited on 2021-10-20
2last month
Acq. date: 2025-12-08
Citations