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Conference contributions
Al-induced defect generation in cubic phase HfO2/SiO2/Si gate stacks
Publication:
Al-induced defect generation in cubic phase HfO2/SiO2/Si gate stacks
Date
2012
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Arimura, Hiroaki
;
Ragnarsson, Lars-Ake
;
Veloso, Anabela
;
Adelmann, Christoph
;
Degraeve, Robin
;
Schram, Tom
;
Chew, Soon Aik
;
Franco, Jacopo
;
Cho, Moon Ju
;
Kaczer, Ben
;
Groeseneken, Guido
;
Horiguchi, Naoto
;
Thean, Aaron
Journal
Abstract
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2002
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations
Metrics
Views
2002
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations