Engineering of chemical and physical properties of low-k materials by different wavelength of UV light

dc.contributor.author	Baklanov, Mikhaïl
dc.contributor.author	Marsik, Premysl
dc.contributor.author	Verdonck, Patrick
dc.contributor.author	Ferchichi, Abdelkarim
dc.contributor.author	Urbanowicz, Adam
dc.contributor.author	Prager, L.
dc.contributor.author	De Roest, D.
dc.contributor.author	Mechri, C.
dc.contributor.imecauthor	Verdonck, Patrick
dc.contributor.orcidimec	Verdonck, Patrick::0000-0003-2454-0602
dc.date.accessioned	2021-10-17T06:14:43Z
dc.date.available	2021-10-17T06:14:43Z
dc.date.issued	2008
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/13332
dc.source.beginpage	28
dc.source.conference	ADMETA: Advanced Metallization Conference
dc.source.conferencedate	8/10/2008
dc.source.conferencelocation	Tokyo Japan
dc.source.endpage	29
dc.title	Engineering of chemical and physical properties of low-k materials by different wavelength of UV light
dc.type	Proceedings paper
dspace.entity.type	Publication
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