Publication:
EDA perspective on manufacturable DPT solutions
Date
| dc.contributor.author | Wiaux, Vincent | |
| dc.contributor.author | Gao, Weimin | |
| dc.contributor.author | Lucas, Kevin | |
| dc.contributor.author | Cork, Chris | |
| dc.contributor.author | Luk-Pat, Gerry | |
| dc.contributor.author | Miloslavsky, Alex | |
| dc.contributor.author | Barnes, L. | |
| dc.contributor.author | Painter, B. | |
| dc.contributor.author | Li, X. | |
| dc.contributor.imecauthor | Wiaux, Vincent | |
| dc.date.accessioned | 2021-10-19T00:25:23Z | |
| dc.date.available | 2021-10-19T00:25:23Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18349 | |
| dc.source.conference | 7th Annual LithoVision Technical Symposium | |
| dc.source.conferencedate | 21/02/2010 | |
| dc.source.conferencelocation | San Jose, CA USA | |
| dc.title | EDA perspective on manufacturable DPT solutions | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |