Publication:

A new dummy-free shallow trench isolation concept for mixed-signal applications

Date

2000
Journal article
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dc.contributor.authorBadenes, Gonçal
dc.contributor.authorRooyackers, Rita
dc.contributor.authorAugendre, Emmanuel
dc.contributor.authorVandamme, Ewout
dc.contributor.authorPerello, Carles
dc.contributor.authorHeylen, Nancy
dc.contributor.authorGrillaert, Joost
dc.contributor.authorDeferm, Ludo
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorDeferm, Ludo
dc.date.accessioned2021-10-14T12:40:01Z
dc.date.available2021-10-14T12:40:01Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4082
dc.source.beginpage3287
dc.source.endpage3282
dc.source.issue10
dc.source.journalJournal of the Electrochemical Society
dc.source.volume147
dc.title

A new dummy-free shallow trench isolation concept for mixed-signal applications

dc.typeJournal article
dspace.entity.typePublication
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