Publication:

Quantification of nanospreading resistance profiling data

Date

1998
Journal article
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dc.contributor.authorDe Wolf, Peter
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-09-30T11:45:46Z
dc.date.available2021-09-30T11:45:46Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2515
dc.source.beginpage320
dc.source.endpage326
dc.source.issue1
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume16
dc.title

Quantification of nanospreading resistance profiling data

dc.typeJournal article
dspace.entity.typePublication
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