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Influence of the As and BF2 junction implantation on the stress induced defects during the Ti- and Co/Ti-silicidation
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1998 since deposited on 2021-10-14
Acq. date: 2025-10-24
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Metrics
Views
1998 since deposited on 2021-10-14
Acq. date: 2025-10-24
Citations