Publication:
The effects of VUV radiation on low-k organosilicate glass (SiCOH) as measured with electron-spin resonance
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1864 since deposited on 2021-10-23
2last month
Acq. date: 2026-04-06
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Statistics
Views
1864 since deposited on 2021-10-23
2last month
Acq. date: 2026-04-06
Citations