Publication:
The effects of VUV radiation on low-k organosilicate glass (SiCOH) as measured with electron-spin resonance
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1861 since deposited on 2021-10-23
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Acq. date: 2026-02-26
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Views
1861 since deposited on 2021-10-23
1last month
1last week
Acq. date: 2026-02-26
Citations