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Elimination of the axial deformation problem of Cu-TSV in 3D integration
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Elimination of the axial deformation problem of Cu-TSV in 3D integration
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Date
2010
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Okoro, Chukwudi
;
Huyghebaert, Cedric
;
Van Olmen, Jan
;
Labie, Riet
;
Vandevelde, Bart
;
Beyne, Eric
;
Vandepitte, Dirk
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1973
since deposited on 2021-10-18
Acq. date: 2025-12-10
Citations
Metrics
Views
1973
since deposited on 2021-10-18
Acq. date: 2025-12-10
Citations