Publication:
MTF test system with AC based dynamic joule correction for electromigration tests on interconnects
Date
| dc.contributor.author | Biesemans, L. | |
| dc.contributor.author | Schepers, K. | |
| dc.contributor.author | Vanstreels, Kris | |
| dc.contributor.author | D'Haen, Jan | |
| dc.contributor.author | De Ceuninck, Ward | |
| dc.contributor.author | D'Olieslaeger, Marc | |
| dc.contributor.imecauthor | Vanstreels, Kris | |
| dc.contributor.imecauthor | D'Haen, Jan | |
| dc.contributor.imecauthor | De Ceuninck, Ward | |
| dc.contributor.imecauthor | D'Olieslaeger, Marc | |
| dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
| dc.contributor.orcidimec | De Ceuninck, Ward::0000-0002-4630-5569 | |
| dc.contributor.orcidimec | D'Olieslaeger, Marc::0000-0001-7951-8037 | |
| dc.date.accessioned | 2021-10-15T12:44:05Z | |
| dc.date.available | 2021-10-15T12:44:05Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8590 | |
| dc.source.beginpage | 1849 | |
| dc.source.conference | Proceedings of the 15th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis - ESREF | |
| dc.source.conferencedate | 4/10/2004 | |
| dc.source.conferencelocation | Zürich Switzerland | |
| dc.source.endpage | 1854 | |
| dc.title | MTF test system with AC based dynamic joule correction for electromigration tests on interconnects | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |