Publication:

Local compressive stress generation in electron irradiated boron-doped Si0.75Ge0.25/Si devices

Date

2012
Journal article
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Author(s)

Tsunoda, Isao
;
Nakashima, Toshiyuki
;
Naka, Noboyuki
;
Idemoto, Tatsuya
;
Yoneoka, Masahi
;
Takakura, Kenichiro  
;
Yoshino, Kenji
;
Bargallo Gonzalez, Mireia
;
Simoen, Eddy  
;
Claeys, Cor
;
Ohyama, Hidenori

Journal

Physica Status Solidi C

Abstract

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