Publication:
Empfindliches schützen: Wie Sie mikromechanische Systeme schützen
Date
| dc.contributor.author | Van Bavel, Mieke | |
| dc.contributor.imecauthor | Van Bavel, Mieke | |
| dc.date.accessioned | 2021-10-14T23:27:52Z | |
| dc.date.available | 2021-10-14T23:27:52Z | |
| dc.date.issued | 2002-10 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6907 | |
| dc.source.beginpage | 48 | |
| dc.source.endpage | 50 | |
| dc.source.journal | Elektronik Journal | |
| dc.title | Empfindliches schützen: Wie Sie mikromechanische Systeme schützen | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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