Publication:
Imec treats HF-wastewater with Crystalactor
Date
| dc.contributor.author | Van Hoeymissen, Jan | |
| dc.contributor.author | Giesen, A. | |
| dc.date.accessioned | 2021-10-14T18:04:04Z | |
| dc.date.available | 2021-10-14T18:04:04Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5733 | |
| dc.source.beginpage | 265 | |
| dc.source.journal | Semiconductor Fabtech | |
| dc.source.volume | 14 | |
| dc.title | Imec treats HF-wastewater with Crystalactor | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |