Publication:
Fundamental study on the impact of C Co-implantation on ultra shallow B junctions
Date
| dc.contributor.author | Zschaetzsch, Gerd | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Hoffmann, Thomas Y. | |
| dc.contributor.author | Everaert, Jean-Luc | |
| dc.contributor.author | del Agua Borniquel, Jose Ignacio | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Everaert, Jean-Luc | |
| dc.contributor.imecauthor | del Agua Borniquel, Jose Ignacio | |
| dc.date.accessioned | 2021-10-18T05:50:30Z | |
| dc.date.available | 2021-10-18T05:50:30Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16617 | |
| dc.source.beginpage | 123 | |
| dc.source.conference | 9th International Workshop on Junction Technology - IWJT | |
| dc.source.conferencedate | 11/06/2009 | |
| dc.source.conferencelocation | Kyoto Japan | |
| dc.source.endpage | 126 | |
| dc.title | Fundamental study on the impact of C Co-implantation on ultra shallow B junctions | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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