Process development of fast and sensitive polySiGe microbolometer arrays

dc.contributor.author	De Moor, Piet
dc.contributor.author	Kavadias, Spyros
dc.contributor.author	Leonov, Vladimir
dc.contributor.author	Van Hoof, Chris
dc.contributor.imecauthor	De Moor, Piet
dc.contributor.imecauthor	Leonov, Vladimir
dc.contributor.imecauthor	Van Hoof, Chris
dc.contributor.orcidimec	Leonov, Vladimir::0000-0002-4364-8945
dc.date.accessioned	2021-10-14T16:46:23Z
dc.date.available	2021-10-14T16:46:23Z
dc.date.issued	2001
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/5199
dc.source.beginpage	94
dc.source.conference	Photodetectors: Materials and Devices VI;
dc.source.conferencelocation
dc.source.endpage	99
dc.title	Process development of fast and sensitive polySiGe microbolometer arrays
dc.type	Proceedings paper
dspace.entity.type	Publication
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