Publication:
Analysis of EUV induced depolymerization and side reactions of polyphthalaldehydes for dry develop EUV resist applications
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0003-3775-3578 | |
| cris.virtual.orcid | 0000-0002-9080-6475 | |
| cris.virtual.orcid | 0000-0003-3927-5207 | |
| cris.virtualsource.department | 1fd77399-4d0a-4004-8a7f-9634c67c90de | |
| cris.virtualsource.department | 331be535-3fb4-49ff-a220-052d12b1cd05 | |
| cris.virtualsource.department | ffad9b55-9af5-4edb-8c86-134820dc8dd9 | |
| cris.virtualsource.orcid | 1fd77399-4d0a-4004-8a7f-9634c67c90de | |
| cris.virtualsource.orcid | 331be535-3fb4-49ff-a220-052d12b1cd05 | |
| cris.virtualsource.orcid | ffad9b55-9af5-4edb-8c86-134820dc8dd9 | |
| dc.contributor.author | Naqvi, Bilal | |
| dc.contributor.author | Schwartz, Jared | |
| dc.contributor.author | Engler, Anthony | |
| dc.contributor.author | Kohl, Paul A. | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.author | De Simone, Danilo | |
| dc.contributor.imecauthor | Naqvi, Bilal A. | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.imecauthor | De Simone, Danilo | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.contributor.orcidimec | De Simone, Danilo::0000-0003-3927-5207 | |
| dc.date.accessioned | 2025-03-31T05:47:03Z | |
| dc.date.available | 2025-03-31T05:47:03Z | |
| dc.date.issued | 2025-MAR 11 | |
| dc.description.wosFundingText | The authors are thankful to Alexis Franquet and Rita Tilmann at the MCA department of imec for performing TOF-SIMS analysis. The authors (ACE and PAK) gratefully acknowledge the financial support from the Laboratory Directed Research and Development program at Sandia National Laboratories under contract DE-NA-0003525. Any subjective views or opinions expressed in the paper do not necessarily represent the views of the U.S. Department of Energy (DOE) or the US. Government. | |
| dc.identifier.doi | 10.1039/d4tc05250a | |
| dc.identifier.issn | 2050-7526 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45458 | |
| dc.publisher | ROYAL SOC CHEMISTRY | |
| dc.source.journal | JOURNAL OF MATERIALS CHEMISTRY C | |
| dc.source.numberofpages | 9 | |
| dc.subject.keywords | CHEMICAL AMPLIFICATION | |
| dc.subject.keywords | PHTHALALDEHYDE | |
| dc.subject.keywords | PHOTOLYSIS | |
| dc.title | Analysis of EUV induced depolymerization and side reactions of polyphthalaldehydes for dry develop EUV resist applications | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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