Impact of Sub-mu m Wafer Thinning on Latch-up Risk in STCO Scaling Era

Publication:

2021

Proceedings Paper

Author(s)

Serbulova, Kateryna

;

Chen, Shih-Hung

;

Hellings, Geert

;

Hiblot, Gaspard

;

Veloso, Anabela

;

Jourdain, Anne

;

De Boeck, Jo

;

Groeseneken, Guido

;

Horiguchi, Naoto

43rd Annual EOS/ESD Symposium (EOS/ESD) Proceedings

1132 since deposited on 2023-06-20

Acq. date: 2026-02-27