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Extreme thinning of Si wafers for via-last and multi wafer stacking applications
Publication:
Extreme thinning of Si wafers for via-last and multi wafer stacking applications
Date
2018
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Jourdain, Anne
;
De Vos, Joeri
;
Rassoul, Nouredine
;
Zahedmanesh, Houman
;
Miller, Andy
;
Beyer, Gerald
;
Beyne, Eric
;
Walsby, Edward
;
Patel, Jash
;
Ansell, Oliver
;
Ashraf, Huma
;
Thomas, Dave
;
Li, Shifang
;
Chang, Timothy
;
Hiebert, Stephen
;
Cross, Andrew
;
Stoerring, Moritz
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2035
since deposited on 2021-10-25
Acq. date: 2025-10-25
Citations
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Views
2035
since deposited on 2021-10-25
Acq. date: 2025-10-25
Citations