Publication:

Micro-opto-mechanical pressure sensor (MOMPS) in SIN integrated photonics platform

Date

2016-05

Proceedings Paper

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Files

33885.pdf 32.19 KB

Author(s)

;

Rochus, Veronique

;

Goyvaerts, Jeroen

;

Vandenbosch, Guy

;

van de Voort, Bob

;

Neutens, Pieter

;

O'Callaghan, John

;

Tilmans, Harrie

;

Rottenberg, Xavier

Statistics

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Acq. date: 2026-02-26